PVD AUTOMATION PLATFORM
ONE SOFTWARE.
EVERY PVD SYSTEM.
One software architecture for every PVD system — from new machines to complex retrofits.




ONE ARCHITECTURE
EVERY MACHINE CONCEPT.
From batch systems to complex cluster, inline and roll-to-roll platforms — EFAROVAC uses one consistent software architecture.
BATCH
Single-chamber systems

CLUSTER
Multi-module systems

INLINE
Linear process systems

ROLL-TO-ROLL
Continuous web systems

BUILT TO ADAPT
FROM NEW MACHINES
TO EXISTING SYSTEMS.
A flexible automation platform for new PVD equipment, complex machine concepts and modernization projects.
MANUFACTURER
INDEPENDENT
Open architecture for different machine concepts and component configurations.
RETROFIT
READY
Modernize existing PVD systems with a typical retrofit downtime of no more than four weeks.
TWINCAT
BASED
Industrial automation architecture built on Beckhoff TwinCAT.
CONTINUOUSLY
UPGRADEABLE
Systems remain extensible and upgradeable throughout their entire lifecycle.
PVD SOFTWARE PLATFORM
ONE INTERFACE.
COMPLETE PROCESS CONTROL.
From machine visualization and process control to recipes, diagnostics and quality data — EFAROVAC brings the complete PVD process into one software environment.

3D PROCESS
VISUALIZATION
Machine states and process data directly in the system model.
PROCESS
CONTROL
Central operation of vacuum, gas, sources and machine components.
LIVE PROCESS
DATA
All relevant values and system states available in real time.
